Gas laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating amplified laser light using a gas laser device;
• outputting the amplified laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the amplified laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device including a laser oscillator configured to output laser light and a laser amplifier configured to amplify the laser light and output the amplified laser light,
• the laser amplifier including:
• a discharge chamber including a pair of electrodes for causing discharge;
• an input coupling optical system configured to cause at least a part of the laser light to be transmitted toward the discharge chamber;
• and
• an output coupling optical system configuring an optical resonator along with the input coupling optical system and configured to cause at least a part of the laser light transmitted through the input coupling optical system and the discharge chamber to be transmitted therethrough and output the amplified laser light, the output coupling optical system and the input coupling optical system facing each other, and
• a first focal point of the input coupling optical system in a first direction being perpendicular to a direction of the discharge and a second focal point of the output coupling optical system in the first direction coinciding with each other at a position between the input coupling optical system and the output coupling optical system,
• wherein the input coupling optical system includes a first surface and a second surface through which the laser light is transmitted, the second surface facing the discharge chamber,
• the output coupling optical system includes a third surface and a fourth surface through which the laser light is transmitted, the third surface facing the discharge chamber, the third surface and the second surface facing each other,
• a curvature radius of the second surface in the first direction is larger than a curvature radius of the third surface in the first direction,
• a distance from the second surface to the first focal point and a distance from the third surface to the second focal point are different from each other, and
• a resonator length of the optical resonator coincides with a sum of the distance from the second surface to the first focal point and the distance from the third surface to the second focal point.