Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices

A method for manufacturing an anode of discharge electrodes used in a gas laser apparatus in which a fluorine-containing laser gas is excited by discharge, the method comprising:

• a first step of forming a coating layer at first side surfaces and a first discharge surface out of surfaces of an electrode base that constitutes the anode, the first discharging surface facing a cathode of the discharge electrodes;
• and
• a second step of partially removing the coating layer in such a way that a shape of the coating layer approaches a target shape,
• the second step including partially removing the coating layer in such a way that first corners in a cross section perpendicular to a longitudinal direction of the cathode are closer to a position where the cathode is disposed in a discharge direction of discharge between the anode and the cathode than second corners in the cross section, the first corners connecting first straight sections formed of the first side surfaces to a first curved section formed of the first discharge surface, the second corners connecting second straight sections formed of second side surfaces that are side surfaces of the coating layer to a second curved section formed of a second discharge surface that is a discharge surface of the coating layer.

A method for manufacturing electronic devices, the method comprising:

• generating laser light by using a gas laser apparatus including a laser chamber including discharge electrodes used in the gas laser apparatus, in which a fluorine-containing laser gas is excited by discharge, the discharge electrodes including
• a cathode, and
• an anode,
• the anode being disposed so as to face the cathode in a discharge direction perpendicular to a longitudinal direction of the cathode,
• the anode including an electrode base containing metal, and a coating layer that covers a portion of a surface of the electrode base and contains an insulating material,
• first corners, in a cross section perpendicular to the longitudinal direction, connecting first straight sections formed of first side surfaces that are side surfaces of the electrode base to a first curved section formed of a first discharge surface that is a discharge surface of the electrode base, the first corners being closer to the cathode in the discharge direction than second corners, in the cross section, connecting second straight sections formed of second side surfaces that are side surfaces of the coating layer to a second curved section formed of a second discharge surface that is a discharge surface of the coating layer;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture the electronic devices.