Laser chamber and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating laser light using a laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser device including an optical resonator, and a laser chamber arranged on an optical path of the optical resonator, and
• the laser chamber including:
• a housing having an inner wall including a plurality of guide components provided with a gap, the guide component having an inclined surface by which the gap is narrowed toward an opening at an interior side of the housing;
• a pair of discharge electrodes arranged at the interior;
• and
• a fan arranged at the interior and configured to cause a laser gas at the interior to circulate along the inner wall.