Laser chamber apparatus, laser apparatus, and electronic device manufacturing method

A laser apparatus comprising:

• a laser chamber apparatus configured to output laser light,
• the laser chamber apparatus including a chamber body,
• a first discharge electrode disposed in an internal space of the chamber body and having a longitudinal direction aligned with an optical axis of the laser light,
• a second discharge electrode so disposed in the internal space that the second discharge electrode faces the first discharge electrode and has a longitudinal direction aligned with the optical axis of the laser light,
• a return member electrically connecting the second discharge electrode to the chamber body over a length from one end to another end of the second discharge electrode in the longitudinal direction, and
• a support member supporting the second discharge electrode with respect to the chamber body,
• either of (i) the support member and the chamber body or (ii) the second discharge electrode and the support member being connected to each other via multiple insulators.

An electronic device manufacturing method comprising:

• generating laser light by using a laser apparatus;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture electronic devices,
• the laser apparatus including a laser chamber apparatus including a chamber body,
• a first discharge electrode disposed in an internal space of the chamber body and having a longitudinal direction aligned with an optical axis of the laser light,
• a second discharge electrode so disposed in the internal space that the second discharge electrode faces the first discharge electrode and has a longitudinal direction aligned with the optical axis of the laser light,
• a return member electrically connecting the second discharge electrode to the chamber body over a length from one end to anther end of the second discharge electrode in the longitudinal direction, and
• a support member supporting the second discharge electrode with respect to the chamber body,
• either of (i) the support member and the chamber body or (ii) the second discharge electrode and the support member being connected to each other via multiple insulators.