Laser chamber, laser device, and electronic device manufacturing method

A laser device comprising:

• an optical resonator;
• and
• a laser chamber arranged so that an optical path of the optical resonator passes therethrough,
• the laser chamber including:
• a container configured to be filled with a laser gas;
• a first electrode arranged in the container;
• a second electrode arranged at a position closer to an inner wall of the container than the first electrode while facing the first electrode;
• and
• a preionization device arranged on at least one lateral side of the first electrode, and
• the preionization device including:
• a dielectric pipe;
• a preionization inner electrode arranged in the dielectric pipe;
• a preionization outer electrode arranged in contact with outside of the dielectric pipe;
• an electrically insulating tube inserted between the dielectric pipe and the preionization inner electrode at an end part of the dielectric pipe in a longitudinal direction;
• and
• an electrically insulating fixing base that fixes the dielectric pipe at the end part of the dielectric pipe in the longitudinal direction and makes point contact with the dielectric pipe.

An electronic device manufacturing method, comprising:

• generating laser light using a laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser device including:
• an optical resonator;
• and
• a laser chamber arranged so that an optical path of the optical resonator passes therethrough,
• the laser chamber including:
• a container configured to be filled with a laser gas;
• a first electrode arranged in the container;
• a second electrode arranged at a position closer to an inner wall of the container than the first electrode while facing the first electrode;
• and
• a preionization device arranged on at least one lateral side of the first electrode, and
• the preionization device including:
• a dielectric pipe;
• a preionization inner electrode arranged in the dielectric pipe;
• a preionization outer electrode arranged in contact with outside of the dielectric pipe;
• an electrically insulating tube inserted between the dielectric pipe and the preionization inner electrode at an end part of the dielectric pipe in a longitudinal direction;
• and
• an electrically insulating fixing base that fixes the dielectric pipe at the end part of the dielectric pipe in the longitudinal direction and makes point contact with the dielectric pipe.