H01S 3/0384
Auxiliary electrodes
Official title: {Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor}
H01S3/0384 (Auxiliary electrodes) appears on 66 US grants and 51 published applications in this corpus.
Search patents in H01S- Granted patents
- 66
- Published applications
- 51
- Assignees
- 41
- Inventors
- 160
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 3 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 2 |
| 2002 | 2 | 3 |
| 2003 | 8 | 0 |
| 2004 | 2 | 2 |
| 2005 | 2 | 3 |
| 2006 | 1 | 2 |
| 2007 | 0 | 3 |
| 2008 | 2 | 5 |
| 2009 | 4 | 1 |
| 2010 | 3 | 4 |
| 2011 | 2 | 0 |
| 2012 | 1 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 3 |
| 2015 | 1 | 3 |
| 2016 | 3 | 3 |
| 2017 | 5 | 1 |
| 2018 | 1 | 1 |
| 2019 | 0 | 0 |
| 2020 | 0 | 1 |
| 2021 | 1 | 1 |
| 2022 | 0 | 0 |
| 2023 | 1 | 1 |
| 2024 | 0 | 3 |
| 2025 | 0 | 4 |
| 2026 | 1 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Gas laser amplifier, gas laser apparatus, EUV light generation apparatus, and EUV exposure apparatus16 Jun 2026US 12,658,664 B2Mitsubishi Electric Corporation
- Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device21 Feb 2023US 11,588,291 B2Gigaphoton Inc.
- Capacitor cooling structure and laser apparatus29 Jun 2021US 11,050,210 B2Gigaphoton Inc.
- Laser oscillator30 Oct 2018US 10,116,112 B2Via Mechanics, Ltd.
- Gas laser oscillator having auxiliary electrodes14 Nov 2017US 9,819,139 B2Fanuc Corporation
- Laser chamber apparatus, laser apparatus, and electronic device manufacturing method10 Sep 2026US 2026/0269553 A1Gigaphoton Inc.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Laser chamber, gas laser apparatus, and electronic device manufacturing method28 May 2026US 2026/0149232 A1Gigaphoton Inc.
Most cited
By later US patents
- Method of annealing implanted semiconductors by lasers108US 4,370,175 A1983
- Discharge excitation type short pulse laser device63US 4,686,682 AMitsubishi Denki Kabushiki Kaisha · 1987
- Pulsed gas-discharge laser60US 5,247,534 ALambda Physik Forschungsgesellschaft mbH · 1993
- Pre-ionizer for a laser54US 5,337,330 ACymer Laser Technologies · 1994
- Preionization electrode for pulsed gas laser50US 4,953,174 AHughes Aircraft Company · 1990