Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device

A gas laser apparatus comprising a laser chamber apparatus,

• the laser chamber apparatus including
• a dielectric pipe,
• an inner electrode disposed in a through hole in the pipe,
• an outer electrode including a contact plate extending along a longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of a plurality of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and
• a leaf spring extending along the longitudinal direction of the pipe, being a separate member from the outer electrode, and configured to contact with the outer electrode and to press the outer electrode against the pipe,
• the leaf spring including a plurality of leaf spring pieces separated by slits resulting from cutting of the leaf spring from an edge thereof along the longitudinal direction of the pipe, and
• the leaf spring pieces each including a bent section bent along the edge and are configured to contact with the bar members in a position shifted from the bent sections toward the edge and to press the bar members.

A method for manufacturing an electronic device, the method comprising:

• generating laser light in a gas laser apparatus including a laser chamber apparatus;
• outputting the laser light to an exposure apparatus;
• and
• exposing a light sensitive substrate to the laser light in the exposure apparatus to manufacture the electronic device,
• the laser chamber apparatus including
• a dielectric pipe,
• an inner electrode disposed in a through hole in the pipe,
• an outer electrode including a contact plate extending along a longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of a plurality of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and
• a leaf spring extending along the longitudinal direction of the pipe, being a separate member from the outer electrode, and configured to contact with the outer electrode and to press the outer electrode against the pipe,
• the leaf spring including a plurality of leaf spring pieces separated by slits resulting from cutting of the leaf spring from an edge thereof along the longitudinal direction of the pipe, and
• the leaf spring pieces each including a bent section bent along the edge and are configured to contact with the bar members in a position shifted from the bent sections toward the edge and to press the bar members.