Laser chamber, gas laser apparatus, and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorTakuya OGAWA
Life of this patent
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Abstract
A laser chamber according to an aspect of the present disclosure includes a container, a first electrode, a second electrode, and a sound absorber. The container is filled with a laser gas. The first electrode is disposed in the container. The second electrode is disposed in the container and faces the first electrode. The sound absorber is disposed on at least one of an upstream side and a downstream side of the laser gas from the first electrode. The sound absorber is configured to cause a propagation speed of an acoustic wave generated in a discharge space between the first electrode and the second electrode to decrease as a distance from the discharge space increases.
Claims20
A laser chamber comprising:
- a container filled with a laser gas;
- a first electrode disposed in the container;
- a second electrode disposed in the container and facing the first electrode;
- and
- a sound absorber disposed on at least one of an upstream side and a downstream side of the laser gas from the first electrode, and configured to cause a propagation speed of an acoustic wave generated in a discharge space between the first electrode and the second electrode to decrease as a distance from the discharge space increases.
A gas laser apparatus comprising:
- an optical resonator;
- and a laser chamber so disposed that an optical path of the optical resonator passes through the laser chamber, the laser chamber including
- a container filled with a laser gas,
- a first electrode disposed in the container,
- a second electrode disposed in the container and facing the first electrode, and
- a sound absorber disposed on at least one of an upstream side and a downstream side of the laser gas from the first electrode, and configured to cause a propagation speed of an acoustic wave generated in a discharge space between the first electrode and the second electrode to decrease as a distance from the discharge space increases.
An electronic device manufacturing method, comprising:
- generating laser light by using a gas laser apparatus;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture electronic devices,
- the gas laser apparatus including an optical resonator, and a laser chamber so disposed that an optical path of the optical resonator passes through the laser chamber,
- the laser chamber including
- a container filled with a laser gas,
- a first electrode disposed in the container,
- a second electrode disposed in the container and facing the first electrode, and
- a sound absorber disposed on at least one of an upstream side and a downstream side of the laser gas from the first electrode, and configured to cause a propagation speed of an acoustic wave generated in a discharge space between the first electrode and the second electrode to decrease as a distance from the discharge space increases.
Dependencies are inferred from the claim text.