Capacitor cooling structure and laser apparatus
AssigneeGigaphoton Inc.
InventorsHisakazu Katsuumi, Junichi Fujimoto, Satoshi Tanaka
Life of this patent
Estimating the term…
Abstract
To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.
Claims20
A capacitor cooling structure for a capacitor including a first electrode and a second electrode, the capacitor cooling structure comprising:
- a conducting part electrically connected with the first electrode;
- an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position;
- a first fastening part configured to fasten the conducting part and the insulating part;
- and
- a cooling part connected with the second position facing the first position,
- the conducting part and the cooling part being electrically insulated from each other by the insulating part.
A laser apparatus comprising:
- a laser chamber;
- a pair of discharge electrodes disposed in the laser chamber;
- a pulse power module including a peaking capacitor and configured to apply pulse voltage between the discharge electrodes;
- a preionization mechanism including a preionization capacitor and configured to ionize part of gas inside the laser chamber, the preionization capacitor including a first electrode and a second electrode;
- a conducting part electrically connected with the first electrode;
- an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position;
- a first fastening part configured to fasten the conducting part and the insulating part to each other;
- and
- a cooling part connected with the second position facing the first position,
- the conducting part and the cooling part being electrically insulated from each other by the insulating part.
Dependencies are inferred from the claim text.