Extreme repetition rate gas discharge laser with improved blower motor
AssigneeCymer, Inc.
InventorsI. Roger Oliver, William N. Partlo
Life of this patent
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AssigneeCymer, Inc.
InventorsI. Roger Oliver, William N. Partlo
Estimating the term…
A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a squirrel cage type fan for producing gas velocities through the discharge region of more than 67 m/s and capable of continuous trouble-free operation for several months, (2) a liquid cooled drive motor having a low loss sealing member separating the motor rotor from the motor starter and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas and (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater.
An extreme repetition rate gas discharge laser capable of operating at pulse repetition rates in the range of 4,000 to 6,000 pulses per second, said laser comprising:
Dependencies are inferred from the claim text.