H01S 3/0382
Cathodes or particular adaptations thereof
Official title: {Cathodes or particular adaptations thereof}
H01S3/0382 (Cathodes or particular adaptations thereof) appears on 69 US grants and 50 published applications in this corpus.
Search patents in H01S- Granted patents
- 69
- Published applications
- 50
- Assignees
- 28
- Inventors
- 117
- Latest grant
- 3 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 3 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 5 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 0 |
| 2002 | 2 | 8 |
| 2003 | 4 | 2 |
| 2004 | 4 | 7 |
| 2005 | 2 | 2 |
| 2006 | 4 | 1 |
| 2007 | 4 | 1 |
| 2008 | 2 | 5 |
| 2009 | 1 | 0 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 2 |
| 2016 | 1 | 1 |
| 2017 | 1 | 1 |
| 2018 | 1 | 0 |
| 2019 | 0 | 1 |
| 2020 | 1 | 1 |
| 2021 | 2 | 3 |
| 2022 | 0 | 0 |
| 2023 | 2 | 4 |
| 2024 | 2 | 2 |
| 2025 | 1 | 9 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices3 Mar 2026US 12,567,713 B2Gigaphoton Inc.
- Electromagnetic shield for a sealing mechanism of a laser chamber4 Mar 2025US 12,245,409 B2Cymer, Inc.
- Plasma heating apparatus, system and method15 Oct 2024US 12,117,165 B2Aureon Energy Ltd.
- Positive high-voltage laser having super-long discharge tube16 Jan 2024US 11,876,336 B2Chengdu Weeson Tech Co., Ltd.
- Method of and apparatus for extending electrode life in a laser chamber3 Oct 2023US 11,777,271 B2Cymer, Inc.
- Chamber device of gas laser apparatus, gas laser apparatus, and electronic device manufacturing method30 Oct 2025US 2025/0337210 A1Gigaphoton Inc.
- Laser chamber, discharge electrode, and electronic device manufacturing method30 Oct 2025US 2025/0337211 A1Gigaphoton Inc.
- Chamber apparatus for laser, gas laser apparatus, and electronic device manufacturing method18 Sep 2025US 2025/0293478 A1Gigaphoton Inc.
- Laser chamber, gas laser device, and electronic device manufacturing method4 Sep 2025US 2025/0279622 A1Gigaphoton Inc.
- Chamber of gas laser apparatus, gas laser apparatus, and electronic device manufacturing method17 Jul 2025US 2025/0233378 A1Gigaphoton Inc.
Most cited
By later US patents
- Discharge device having cathode with micro hollow array70US 5,686,789 AOsram Sylvania Inc. · 1997
- Discharge device having cathode with micro hollow array60US 5,939,829 AOsram Sylvania Inc. · 1999
- Electric discharge laser with acoustic chirp correction59US 6,317,447 B1Cymer, Inc. · 2001
- Gas laser with sputter-resistant cathode38US 4,017,808 AOwens-Illinois, Inc. · 1977
- Electric discharge laser with active wavelength chirp correction30US 6,621,846 B1Cymer, Inc. · 2003