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US 12,245,409 B2Granted
Electromagnetic shield for a sealing mechanism of a laser chamber
AssigneeCymer, Inc.
InventorMohammad Amin Khamehchi
Life of this patent
Estimating the term…
Abstract
An apparatus for a light source includes: an electrical insulator that defines a channel; a gasket that surrounds at least a portion of the electrical insulator; and a shield between the channel and the gasket. The channel is configured to receive an electrical conductor. The gasket includes a non-metallic material.
Claims29
An apparatus for a light source, the apparatus comprising:
- an electrical insulator that defines a channel, the channel configured to receive an electrical conductor;
- a gasket that surrounds at least a portion of the electrical insulator, the gasket comprising a non-metallic material;
- and
- a shield between the channel and the gasket.
1 more element
A discharge chamber comprising:
- a housing;
- an electrode in the housing;
- an electrical conductor that passes through the housing in a first direction and is electrically connected to the electrode;
- an electrical insulator that surrounds a portion of the electrical conductor;
- a gasket that surrounds the electrical insulator;
- and
- a shield around the electrical insulator, wherein the shield extends along the first direction and is configured to attenuate a magnetic field.
4 more elements
A deep ultraviolet (DUV) light source comprising:
- a first chamber configured to produce a first pulsed DUV light beam, the first chamber comprising:
- a first housing;
- a first electrode assembly in the first housing;
- a first insulator comprising a first channel extending along a first direction and configured to receive a first electrical conductor, wherein the first electrical conductor is configured to electrically connect to the first electrode assembly;
- a first gasket that surrounds a portion of the first insulator;
- and
- a first shield that surrounds a portion of the first channel and extends along the first direction, wherein the first shield is configured to attenuate magnetic fields.
4 more elements
A discharge chamber comprising:
- a housing;
- an electrode in the housing;
- an electrical conductor that passes through the housing and is electrically connected to the electrode;
- an electrical insulator that surrounds a portion of the electrical conductor;
- a gasket that surrounds the electrical insulator;
- and
- a shield around the electrical insulator, wherein the shield is configured to block or attenuate a magnetic field, and the shield is disposed between the electrical insulator and the gasket.
4 more elements
A discharge chamber comprising:
- a housing;
- an electrode in the housing;
- an electrical conductor that passes through the housing and is electrically connected to the electrode;
- an electrical insulator that surrounds a portion of the electrical conductor;
- a gasket that surrounds the electrical insulator;
- and
- a shield around the electrical insulator, wherein the shield is configured to block or attenuate a magnetic field;
- and the gasket is in a groove, and the shield is between the electrical insulator and the groove.
5 more elements
A light source comprising:
- a discharge chamber;
- an electrode in the discharge chamber;
- an electrically insulating structure comprising:
- a base portion in the discharge chamber, wherein the base portion extends between the electrode and an external wall of the discharge chamber;
- and
- a plurality of stem portions extending from the base portion and through the external wall of the discharge chamber, wherein each stem portion comprises a channel that passes through the stem portion and the base portion, and each channel is configured to receive an electrical conductor that electrically connects to the electrode;
- a plurality of gaskets, wherein each gasket surrounds one of the stem portions, and the plurality of gaskets comprises at least one non-metallic gasket that comprises a non-metallic material that surrounds a respective one of the stem portions;
- and
- a shield disposed between each of the at least one non-metallic gaskets and the respective one of the stem portions,
- wherein the plurality of gaskets comprises at least one metallic gasket, and each of the at least one metallic gaskets surrounds a respective one of the stem portions without a shield between the metallic gasket and the respective one of the stem portions.
7 more elements
Dependencies are inferred from the claim text.