Laser chamber with fully integrated electrode feedthrough main insulator
AssigneeCymer, Inc.
InventorsR. Kyle Webb, William N. Partlo
Life of this patent
Estimating the term…
Abstract
A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
Claims24
An apparatus for conducting high electric power through the wall of a sealed chamber of an electric discharge laser to an elongated electrode inside the chamber, defining an electrode length, comprising:
- a single piece main insulator of an electrically insulating material larger than said electrode length, said main insulator comprising:
- a first polished substantially planar surface portion and a second polished substantially planar surface portion substantially parallel to said first polished substantially planar surface portion;
- and
- a plurality of substantially cylindrical feedthrough insulator portions integral with said single piece main insulator and extending from said first polished substantially planar surface portion;
- wherein a substantially cylindrical hole extends substantially coaxially through said cylindrical feedthrough insulator portion and through said first and said second polished substantially planar surface portions.
An apparatus for conducting high electric power, comprising:
- a main insulator of an electrically insulating material, said main insulator comprising:
- a first polished substantially planar surface portion and a second polished substantially planar surface portion substantially parallel to said first polished substantially planar surface portion;
- and
- a plurality of substantially cylindrical feedthrough insulator portions integral with said main insulator and extending from said first polished substantially planar surface portion;
- wherein a substantially cylindrical hole extends substantially coaxially through said cylindrical feedthrough insulator portion and through said first and said second polished substantially planar surface portions.
A method of conducting high electric power over a range of operating tempertures through a wall of a sealed gas enclosure of an electric discharge laser to an electrode substantially surrounded by said enclosure, comprising conducting said electric power through said wall within a plurality of feedthrough electrical conductors, each said feedthrough electrical conductor being surrounded substantially cylindrically by a substantially tubular feedthrough insulator portion integral with and extending from a first polished substantially planar surface portion of a single piece main insulator made of an electrically insulating material, said single piece main insulator further comprising a second polished substantially planar surface portion substantially parallel to said first polished substantially planar surface portion.
Dependencies are inferred from the claim text.