H01S 3/0385
Shape
Official title: {Shape}
H01S3/0385 (Shape) appears on 225 US grants and 183 published applications in this corpus.
Search patents in H01S- Granted patents
- 225
- Published applications
- 183
- Assignees
- 86
- Inventors
- 425
- Latest grant
- 3 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 2 | 0 |
| 1983 | 2 | 0 |
| 1984 | 2 | 0 |
| 1985 | 5 | 0 |
| 1986 | 5 | 0 |
| 1987 | 4 | 0 |
| 1988 | 6 | 0 |
| 1989 | 4 | 0 |
| 1990 | 5 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 4 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
| 2001 | 0 | 2 |
| 2002 | 10 | 31 |
| 2003 | 26 | 16 |
| 2004 | 19 | 20 |
| 2005 | 10 | 13 |
| 2006 | 11 | 6 |
| 2007 | 16 | 8 |
| 2008 | 5 | 8 |
| 2009 | 7 | 3 |
| 2010 | 5 | 5 |
| 2011 | 5 | 0 |
| 2012 | 3 | 3 |
| 2013 | 2 | 1 |
| 2014 | 1 | 6 |
| 2015 | 6 | 5 |
| 2016 | 4 | 1 |
| 2017 | 2 | 9 |
| 2018 | 4 | 2 |
| 2019 | 7 | 5 |
| 2020 | 4 | 4 |
| 2021 | 5 | 4 |
| 2022 | 3 | 3 |
| 2023 | 2 | 2 |
| 2024 | 2 | 5 |
| 2025 | 3 | 12 |
| 2026 | 1 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices3 Mar 2026US 12,567,713 B2Gigaphoton Inc.
- Prolonged life laser chamber electrode and laser having same2 Dec 2025US 12,489,266 B2Cymer, Inc.
- Disc laser14 Oct 2025US 12,444,897 B2Idea Machine Development Design & Production Ltd.
- Light emitting sealed body and light source device7 Jan 2025US 12,191,623 B2Energetiq Technology, Inc.
- Radio frequency laser20 Feb 2024US 11,909,163 B1Jilin Yongli Laser Technology Co., Ltd.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Laser chamber and electronic device manufacturing method4 Jun 2026US 2026/0155616 A1Gigaphoton Inc.
- Laser chamber, discharge-excitation-type gas laser device, and electronic device manufacturing method30 Apr 2026US 2026/0121367 A1Gigaphoton Inc.
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Extreme repetition rate gas discharge laser with improved blower motor101US 6,477,193 B2Cymer, Inc. · 2002
- Gas discharge laser with pulse multiplier98US 6,535,531 B1Cymer, Inc. · 2003
- Injection seeded laser with precise timing control96US 6,549,551 B2Cymer, Inc. · 2003