H01J 37/32779
Of batches of workpieces
Official title: {of batches of workpieces}
H01J37/32779 (Of batches of workpieces) appears on 114 US grants and 166 published applications in this corpus.
Search patents in H01J- Granted patents
- 114
- Published applications
- 166
- Assignees
- 80
- Inventors
- 376
- Latest grant
- 17 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 1 | 3 |
| 2005 | 1 | 2 |
| 2006 | 1 | 1 |
| 2007 | 0 | 1 |
| 2008 | 1 | 1 |
| 2009 | 1 | 5 |
| 2010 | 2 | 2 |
| 2011 | 1 | 4 |
| 2012 | 4 | 5 |
| 2013 | 0 | 8 |
| 2014 | 6 | 10 |
| 2015 | 3 | 10 |
| 2016 | 5 | 9 |
| 2017 | 5 | 12 |
| 2018 | 6 | 15 |
| 2019 | 6 | 11 |
| 2020 | 9 | 15 |
| 2021 | 12 | 12 |
| 2022 | 12 | 10 |
| 2023 | 8 | 13 |
| 2024 | 7 | 9 |
| 2025 | 10 | 5 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Batch type substrate processing apparatus17 Feb 2026US 12,555,755 B2Eugene Technology Co., Ltd.
- Glass pallet for sputtering systems23 Dec 2025US 12,505,990 B2View Operating Corporation
- Carrier with vertical grid for supporting substrates in coater16 Dec 2025US 12,500,070 B2View Operating Corporation
- Sputtering apparatus and related systems and methods for sputtering substrates11 Nov 2025US 12,467,129 B2Battelle Savannah River Alliance, LLC
- Substrate processing apparatus and method for processing substrates9 Sep 2025US 12,410,522 B2ASM IP Holding B. V.
- Substrate processing apparatus7 May 2026US 2026/0125791 A1ACM Research Korea CO., LTD.
- Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus9 Oct 2025US 2025/0313955 A1Kokusai Electric Corporation
- Throughput improvement with interval conditioning purging14 Aug 2025US 2025/0257453 A1Lam Research Corporation
- Installation, method, and carrier for coating eyeglass lenses12 Jun 2025US 2025/0191900 A1Schneider GmbH & Co. KG
- Apparatuses for backside wafer processing with edge-only wafer contact10 Apr 2025US 2025/0118592 A1Lam Research Corporation
Most cited
By later US patents
- Substrate processing apparatus346US 8,741,065 B2Tokyo Electron Limited · 2014
- Triode plasma reactor with phase modulated plasma control82US 5,057,185 AConsortium for Surface Processing, Inc. · 1991
- Modular deposition system having batch processing and serial thin film deposition28US 6,139,695 AAkashic Memories Corporation · 2000
- Method and apparatus for enhancing outcome uniformity of direct-plasma processes21US 5,948,283 ALam Research Corporation · 1999
- Apparatus and method for contactless transportation of a device in a vacuum processing system20US 11,508,595 B2APPLIED Materials.Inc. · 2022