Substrate processing apparatus

A substrate processing apparatus for processing substrates within a vacuum processing space, the substrate processing apparatus comprising:

• a substrate stage for mounting at least two substrates thereon, the substrate stage including substrate stage units whose number corresponds to the number of the substrates mounted on the substrate stage and a connecting portion coupling the substrate stage units, each of the substrate stage units including a central temperature control flow path for controlling the temperature of a central portion of each of the substrates and a peripheral temperature control flow path for controlling the temperature of a peripheral portion of each of the substrates, the central temperature control flow path and the peripheral temperature control flow path being formed independently of each other, the connecting portion being provided with a temperature control medium inlet port for introducing therethrough a temperature control medium into the peripheral temperature control flow path, and the connecting portion being provided with temperature control medium outlet ports for discharging therethrough the temperature control medium from the peripheral temperature control flow path, the number of the temperature control medium outlet ports corresponding to the number of the substrates mounted on the substrate stage,
• wherein the peripheral temperature control flow path includes:
• a peripheral inner flow path connected at one end to the temperature control medium inlet port and arranged to extend along the peripheral portion of each of the substrates;
• a peripheral outer flow path connected at one end to each of the temperature control medium outlet ports and arranged to extend along the peripheral portion of each of the substrates;
• and
• a connection flow path arranged to interconnect the other end of the peripheral inner flow path and the other end of the peripheral outer flow path, the connection flow path and each of the temperature control medium outlet ports being arranged adjacent to the temperature control medium inlet port to interpose the temperature control medium inlet port therebetween.