Modular deposition system having batch processing and serial thin film deposition

A method for depositing a plurality of thin film layers on each of a plurality of substrates, the method comprising:

• advancing the substrates in batches along a batch path defined by a plurality of batch chambers, wherein at least two of said plurality of batch chambers each have at least one deposition chamber disposed off the batch path;
• maintaining a reduced pressure along the batch path, the batch chambers being sealed together;
• isolating each batch of the substrates within each of the batch chambers by selectively closing valves disposed therebetween;
• individually transferring substrates from the isolated batches of substrates within one of said plurality of the batch chambers to at least one deposition chamber disposed off the batch path;
• maintaining an environment within each of the batch chambers adjacent the at least one deposition chamber with an environmental control system;
• and
• depositing the layers on the individual substrates within the deposition chamber.

A method for depositing a plurality of thin film layers on each of a plurality of substrates, the method comprising:

• advancing the substrates in batches along a batch path defined by a plurality of successive batch chambers;
• maintaining a reduced pressure along the batch path, the batch chambers being sealed together;
• isolating each batch of the substrates within each of the successive batch chambers by selectively closing valves disposed therebetween;
• individually transferring substrates from one of said successive batch chambers to at least one deposition chamber disposed off the batch path;
• maintaining a deposition environment within each of the batch chambers adjacent the at least one deposition chamber with an environmental control system;
• depositing the layers on the individual substrates within the deposition chambers;
• and
• transferring substrates from another of said successive batch chambers to at least one deposition chamber disposed off the batch path.

A method for depositing a plurality of thin film layers on each of a plurality of substrates, the method comprising:

• advancing the substrates in batches along a batch path defined by a plurality of batch chambers, wherein at least two of said plurality of batch chambers each have at least one deposition chamber disposed off the batch path;
• maintaining a reduced pressure along the batch path, the batch chambers being sealed together;
• isolating each batch of the substrates within each of the batch chambers by selectively closing valves disposed therebetween;
• individually transferring substrates from the isolated batches of substrates within one of said plurality of the batch chambers to at least one deposition chamber disposed off the batch path;
• maintaining an environment within each of the batch chambers adjacent the at least one deposition chamber with an environmental control system, the environmental control system capable of maintaining different environments within at least two of said plurality of batch chambers adjacent the at least one deposition chamber;
• and
• depositing the layers on the individual substrates within the deposition chamber.