Apparatus and method for contactless transportation of a device in a vacuum processing system
AssigneeApplied Materials, Inc.
InventorsHenning Aust, Jörg Schuler
Life of this patent
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Abstract
An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (FL) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.
Claims20
An apparatus for contactless transportation of a device in a vacuum processing system, the apparatus comprising:
- a magnetic transportation arrangement for providing a magnetic levitation force (FL) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units;
- a sensor for monitoring a motion of the device;
- a supply arrangement connected to the device, the supply arrangement providing a media supply or power supply to the device;
- and
- a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.
An apparatus for contactless transportation of a processing device in a vacuum processing system, the apparatus comprising:
- a support) for the processing device, the support comprising one or more active magnetic units;
- a guiding structure extending in a transportation direction of the processing device, wherein the one or more active magnetic units and the guiding structure are configured for providing a magnetic levitation force (FL) for levitating the processing device;
- a sensor for monitoring a motion of the processing device:
- a supply arrangement connected to the processing device, the supply arrangement providing a media supply or power supply to the device;
- and
- a controller connected to the sensor, wherein the controller is configured for controlling the one or more active magnetic units based on a signal provided by the sensor such that a critical motion of the device detected by the sensor is reduced.
A vacuum processing system for processing a substrate, the vacuum processing system comprising:
- a processing chamber adapted for processing the substrate therein;
- and
- an apparatus for contactless transportation of a device in a vacuum processing system, the apparatus comprising:
- a magnetic transportation arrangement for providing a magnetic levitation force (FL) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units;
- a sensor for monitoring a motion of the device;
- a supply arrangement connected to the device, the supply arrangement providing a media supply or power supply to the device;
- and
- a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.
A method for contactlessly transporting a device in a vacuum processing system, the method comprising:
- generating an adjustable magnetic field to levitate the device, the device being connected to a supply arrangement, the supply arrangement providing a media supply or power supply to the device;
- monitoring a motion of the device using a sensor;
- and
- controlling the adjustable magnetic field based on a signal provided by the sensor.
Dependencies are inferred from the claim text.