H01J 2237/0268
Liner tubes
H01J2237/0268 (Liner tubes) appears on 35 US grants and 44 published applications in this corpus.
Search patents in H01J- Granted patents
- 35
- Published applications
- 44
- Assignees
- 27
- Inventors
- 116
- Latest grant
- 20 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 1 |
| 2008 | 2 | 4 |
| 2009 | 0 | 2 |
| 2010 | 1 | 1 |
| 2011 | 4 | 2 |
| 2012 | 1 | 0 |
| 2013 | 1 | 2 |
| 2014 | 0 | 0 |
| 2015 | 2 | 2 |
| 2016 | 0 | 1 |
| 2017 | 1 | 0 |
| 2018 | 4 | 4 |
| 2019 | 1 | 2 |
| 2020 | 3 | 7 |
| 2021 | 3 | 2 |
| 2022 | 3 | 1 |
| 2023 | 0 | 5 |
| 2024 | 0 | 2 |
| 2025 | 4 | 4 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Plasma processing apparatus20 Jan 2026US 12,531,213 B2Tokyo Electron Limited
- Charged particle beam device19 Aug 2025US 12,394,586 B2Hitachi High-Tech Corporation
- Particle beam device, method for operating the particle beam device and computer program product13 May 2025US 12,300,461 B2Carl Zeiss Microscopy GmbH
- Microwave plasma apparatus and methods for processing materials using an interior liner25 Mar 2025US 12,261,023 B26K Inc.
- Gas distribution ring for process chamber4 Mar 2025US 12,243,719 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Electron Microscope and Specimen Observation Method11 Jun 2026US 2026/0162923 A1JEOL Ltd.
- Lens arrangement in an electron microscopy system11 Dec 2025US 2025/0379024 A1
- Split-column acceleration tube for scanning electron microscope13 Nov 2025US 2025/0349498 A1FEI Company
- Multi-beam charged particle imaging system with reduced charging effects21 Aug 2025US 2025/0266241 A1
- Multi-beam particle microscope with improved beam tube3 Jul 2025US 2025/0218719 A1
Most cited
By later US patents
- Substrate cleaning chamber and components488US 7,942,969 B2APPLIED Materials.Inc. · 2011
- Scanning electron microscope and method for controlling a scanning electron microscope29US 5,424,541 AHitachi, Ltd. · 1995
- Charged particle beam apparatus17US 7,339,167 B2Hitachi High-Technologies Corporation · 2008
- Extended life source arc chamber liners11US 6,583,427 B1Texas Instruments Incorporated · 2003
- Scanning electron microscope7US 5,376,792 ARj Lee Group, Inc. · 1994