Electron Microscope and Specimen Observation Method
AssigneeJEOL Ltd.
InventorsTatsuru Kuramoto, Jun Watanabe
Life of this patent
Estimating the term…
Abstract
An electron microscope includes an electron source that emits an electron beam; an electrostatic/electromagnetic field superposed objective lens in which an acceleration tube is built into a magnetic field lens; a correction electrode placed between the acceleration tube and a specimen; and a specimen stage that tiltably supports the specimen. A positive voltage is applied to the acceleration tube, a negative voltage is applied to the correction electrode, and a potential on an optical axis between the correction electrode and the specimen is equal to or higher than a potential of the specimen.
Claims7
An electron microscope comprising:
- an electron source that emits an electron beam;
- an electrostatic/electromagnetic field superposed objective lens in which an acceleration tube is built into a magnetic field lens;
- a correction electrode placed between the acceleration tube and a specimen;
- and
- a specimen stage that tiltably supports the specimen, wherein
- a positive voltage is applied to the acceleration tube,
- a negative voltage is applied to the correction electrode, and
- a potential on an optical axis between the correction electrode and the specimen is equal to or higher than a potential of the specimen.
A specimen observation method using an electron microscope that comprises:
- a specimen stage that tiltably supports a specimen;
- an electron source that emits an electron beam;
- an electrostatic/electromagnetic field superposed objective lens in which an acceleration tube is built into a magnetic field lens;
- and
- a correction electrode placed between the acceleration tube and the specimen,
- the specimen observation method comprising:
- operating an optical system including the electrostatic/electromagnetic field superposed objective lens and the correction electrode;
- tilting the specimen;
- and
- illuminating the specimen with an electron beam to acquire an electron microscope image, wherein
- in the step of operating the optical system,
- by applying a positive voltage to the acceleration tube and applying a negative voltage to the correction electrode, an electron beam is accelerated by the acceleration tube and decelerated by a decelerating electric field formed between the acceleration tube and the specimen, and
- a potential on an optical axis between the correction electrode and the specimen is set equal to or higher than a potential of the specimen.
Dependencies are inferred from the claim text.