Particle beam device, method for operating the particle beam device and computer program product

A particle beam device, comprising:

• a particle source configured to provide charged particles;
• an extraction stop comprising an aperture;
• a driver system configured to apply an electrical extraction stop potential to the extraction stop to generate, from the charged particles, a particle beam that passes through the aperture of the extraction stop;
• an anode stop downstream of the extraction stop and comprising an aperture onto which the particle beam is directed during operation of the particle beam device, the driver system further configured to apply a variably settable electrical anode stop potential to the anode stop, the anode stop potential being different from the extraction stop potential;
• a beam tube downstream of the anode stop and comprising an entrance aperture through which the particle beam enters the beam tube during operation of the particle beam device, the driver system further configured to apply an electrical beam tube potential different from the anode stop potential, to the beam tube;
• a controller configured to control the driver system so that a voltage between the extraction stop and the anode stop is variably settable,
• wherein the aperture of the extraction stop and the aperture of the anode stop are matched to one another such that a current strength of the particle beam passing through the aperture of the anode stop is variably settable by changing the voltage between the extraction stop and the anode stop during operation of the particle beam device.