Scanning electron microscope and method for controlling a scanning electron microscope
AssigneeHitachi, Ltd.
InventorsHideo Todokoro, Tadashi Ohtaka
Life of this patent
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Abstract
A scanning electron microscope is provided with a channel cylinder between a sample and an electron source. The channel cylinder generates a deceleration electrical field to decelerate an electron beam emitted from the electron source. The channel cylinder has a portion having an electron source side and sample side. A detector is provided on the electron source side and sample channel cylinder portion. The detector detects the secondary signal emitted from the sample, so that a scan image is obtained with a high spatial resolution.
Claims22
A scanning electron microscope for scanning an electron beam on a grounded sample comprising:
- a condenser lens,
- an objective lens,
- a sample holder for holding a sample,
- an electron source for emitting said electron beam in a direction through the condenser lens and objective lens to a sample on the sample holder,
- a channel cylinder to which is applied positive voltage, said channel cylinder extending continuously from the condenser lens to the objective lens, and
- a detector for detecting said secondary signal, said detector being located along said channel cylinder intermediate the condenser lens and the sample holder.
A method of scanning an electron beam on a grounded sample, and obtaining an image on the basis of a secondary signal produced from said sample, comprising the steps of:
- scanning said electron beam onto said sample by passing said electron beam from an electron source through a condenser lens, an objective lens, and a channel cylinder extending continuously from the condenser lens to the objective lens;
- applying positive voltage to the channel cylinder;
- and
- detecting said secondary signal at a section of said channel cylinder intermediate the condenser lens and the sample.
Dependencies are inferred from the claim text.