Substrate cleaning chamber and components
AssigneeApplied Materials, Inc.
InventorsMartin Riker, Wei W. Wang
Life of this patent
Estimating the term…
Abstract
A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring.
Claims22
A gas distributor plate for a substrate process chamber, the gas distributor plate comprising:
- (a) a first ring of first holes that each have a diameter d;
- (b) a second ring of second holes that each have a diameter 2d, the second ring being radially outward of the first ring;
- (c) a third ring of third holes that each have a diameter 3d, the third ring being radially outward of the second ring;
- and
- (d) a fourth ring of fourth holes that each have a diameter 4d, the fourth ring being radially outward of the third ring.
A gas distributor plate for a substrate process chamber, the gas distributor plate comprising:
- (a) a first ring of first holes that each have a diameter d of from about 1 to about 5 mm;
- (b) a second ring of second holes that each have a diameter 2d of from about 2 to about 10 mm, the second ring being radially outward of the first ring;
- (c) a third ring of third holes that each have a diameter 3d of from about 3 to about 15 mm, the third ring being radially outward of the second ring;
- and
- (d) a fourth ring of fourth holes that each have a diameter 4d of from about 4 to about 20 mm, the fourth ring being radially outward of the third ring.
A gas distributor plate for a substrate process chamber, the gas distributor plate comprising:
- (a) a first ring of first holes that each have a diameter of from about 1 to about 5 mm;
- (b) a second ring of second holes that each have a diameter of from about 2 to about 10 mm, the second ring being radially outward of the first ring;
- (c) a third ring of third holes that each have a diameter of from about 3 to about 15 mm, the third ring being radially outward of the second ring;
- and
- (d) a fourth ring of fourth holes that each have a diameter of from about 4 to about 20 mm, the fourth ring being radially outward of the third ring.
Dependencies are inferred from the claim text.