Extended life source arc chamber liners
AssigneeTexas Instruments Incorporated
InventorsWalter J. Edmonds, Timothy B. Vaughn
Life of this patent
Estimating the term…
Abstract
A liner (102) for an arc chamber (100) of an ion implanter. The arc chamber (100) comprises a liner (102) on the inner surface (104) of the arc chamber (100) that extends the life of the arc chamber (100). The liner (102) comprises a one piece portion (102a) that covers the bottom and long sidewalls of the arc chamber (100) and two end plates (102b) for covering the end walls of the arc chamber (100). When the liner (102) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber (100).
Claims13
A liner for an arc chamber of an ion implanter, comprising:
- a one piece portion with at least two bends for covering a bottom surface and two inner sidewalls of said arc chamber;
- and
- two end plates for covering two additional inner sidewalls of said arc chamber.
An ion implanter comprising:
- an arc chamber;
- and
- a removable liner within said arc chamber, said liner comprising:
- a one piece portion with at least two bends for covering a bottom surface and two inner sidewalls of said arc chamber;
- and
- two end plates for covering two additional inner sidewalls of said arc chamber.
Dependencies are inferred from the claim text.