G03F 7/709
Vibration
Official title: {Vibration, e.g. vibration detection, compensation, suppression or isolation}
G03F7/709 (Vibration) appears on 688 US grants and 686 published applications in this corpus.
Search patents in G03F- Granted patents
- 688
- Published applications
- 686
- Assignees
- 96
- Inventors
- 1,084
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 3 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 3 | 0 |
| 1993 | 3 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 9 | 0 |
| 1997 | 9 | 0 |
| 1998 | 12 | 0 |
| 1999 | 13 | 0 |
| 2000 | 20 | 0 |
| 2001 | 32 | 12 |
| 2002 | 24 | 40 |
| 2003 | 24 | 35 |
| 2004 | 29 | 34 |
| 2005 | 37 | 38 |
| 2006 | 31 | 49 |
| 2007 | 23 | 34 |
| 2008 | 29 | 49 |
| 2009 | 17 | 44 |
| 2010 | 19 | 18 |
| 2011 | 23 | 30 |
| 2012 | 25 | 25 |
| 2013 | 24 | 18 |
| 2014 | 29 | 23 |
| 2015 | 20 | 28 |
| 2016 | 27 | 20 |
| 2017 | 30 | 31 |
| 2018 | 38 | 31 |
| 2019 | 31 | 27 |
| 2020 | 22 | 17 |
| 2021 | 18 | 12 |
| 2022 | 8 | 10 |
| 2023 | 9 | 17 |
| 2024 | 11 | 14 |
| 2025 | 10 | 9 |
| 2026 | 11 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability22 Sep 2026US 12,743,032 B2Cymer, Inc.
- Ultra-stable multi-directional low-frequency actuator14 Jul 2026US 12,680,594 B2Shanghai University
- Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium19 May 2026US 12,631,972 B2Canon Kabushiki Kaisha
- Stage apparatus, exposure apparatus, method of manufacturing flat panel display, and device manufacturing method14 Apr 2026US 12,601,980 B2Nikon Corporation
- Buffer unit and substrate treating apparatus including the same3 Mar 2026US 12,566,387 B2Semes Co., Ltd.
- Damper, method for damping, and apparatus including a damper17 Sep 2026US 2026/0276056 A1ASML Netherlands B. V.
- Silencer and lithographic apparatus thermal conditioning system27 Aug 2026US 2026/0251255 A1ASML Netherlands B. V.
- Debris trap unit and light source apparatus27 Aug 2026US 2026/0255465 A1Ushio Denki Kabushiki Kaisha
- Fluid transport system temperature conditioning system lithographic apparatus and flexible hose13 Aug 2026US 2026/0235246 A1ASML Netherlands B. V.
- Stage apparatus, lithography apparatus, and article manufacturing method6 Aug 2026US 2026/0227713 A1Canon Kabushiki Kaisha
Most cited
By later US patents
- Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device918US 5,969,441 AASM Lithography B. V. · 1999
- Sliding seal469US 6,600,547 B2Nikon Corporation · 2003
- Guideless stage with isolated reaction stage460US 5,528,118 ANikon Precision Inc. · 1996
- Window frame-guided stage mechanism438US 5,874,820 ANikon Corporation · 1999
- Positioning device having two object holders379US 6,262,796 B1ASM Lithography B. V. · 2001