US 2026/0235246 A1 · FLUID TRANSPORT SYSTEM TEMPERATURE CONDITIONING SYSTEM LITHOGRAPHIC APPARATUS AND FLEXIBLE HOSE

Fluid transport system temperature conditioning system lithographic apparatus and flexible hose

AssigneeASML Netherlands B.V.

InventorsAbdolrahim REZAEIHA, Arjun NAGARAJAN, Maurice Wilhelmus Leonardus Hendricus FEIJTS, Javid KHALILOV, Remco VAN DE MEERENDONK, Vignesh Srinivasan BALARAJ, Markus Josephus Cornelis SCHAPENDONK, Johannes Henricus Wilhelmus JACOBS, Jacobus Johannus Leonardus Hendricus VERSPAIJ, Zhuangxiong HUANG, Nick Hendricus Martinus VAN DE WETERING, Ingmar Gerrit Willem KRABBEN, Marc Wilhelmus Maria VAN DER WIJST, Ozan Erdem DEMIREL, Petrus Theodorus Martinus ALBERS, Krzysztof, Mateusz PASIUT

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Abstract

A fluid transport system, including a first gas silencer, a second gas silencer, and a tubular acoustic damping device having a conduit made of viscoelastic material, wherein the first gas silencer and the second gas silencer are fluidly connected to each other by a fluid line, and wherein the tubular acoustic damping device is provided in the fluid line between the first gas silencer and the second gas silencer such that the conduit of the tubular acoustic damping device is a part of the fluid line.

Claims21

Dependent claims

A fluid transport system, comprising:

a first gas silencer;
a second gas silencer;
and
a tubular acoustic damping device comprising a conduit made of viscoelastic material,
wherein the first gas silencer and the second gas silencer are fluidly connected to each other by a fluid line, and
wherein the tubular acoustic damping device is in the fluid line between the first gas silencer and the second gas silencer such that the conduit of the tubular acoustic damping device is a part of the fluid line.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

19/156,251Filed 6 Mar 2024

Priority

EP 23161851.314 Mar 2023

Published

13 Aug 2026

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

F16L 55/0335
Noise absorbers: by means of external rings
F16L 55/0336
Noise absorbers: by means of sound-absorbing materials
G03F 7/70858
Construction of apparatus, e.g. environment aspects, hygiene aspects or materials: environment aspects, e.g. pressure of beam-path gas, temperature
G03F 7/70875
Of mask or workpiece: temperature, e.g. temperature control of masks or workpieces via control of stage temperature