Sliding seal

A sliding seal system for use in a photolithography system to provide a seal between an exposure apparatus and a chamber, the sliding seal system comprising:

• a support member having a working surface arranged to provide a seal interface with a sealing surface on the chamber;
• a membrane attached to the support member, and coupled to the exposure apparatus;
• interior and exterior fluid delivery systems for delivering first and second fluids to a region between the working surface and sealing surface to provide buoyant floatation for the support member;
• and
• interior and exterior fluid exhaust systems, wherein the interior fluid exhaust system is designed to remove the first fluid delivered through the interior fluid delivery system and the exterior fluid exhaust system is designed to remove the second fluid delivered through the exterior fluid delivery system.

A lithography system comprising:

• an illumination system;
• an optical system;
• a stage that is moveable relative to the optical system;
• an enclosure that surrounds at least a portion of the stage, the enclosure having a sealing surface;
• a support member having a working surface arranged to provide a seal interface with the sealing surface on the enclosure;
• a membrane attached to the support member, and coupled to the optical system;
• and
• a fluid supply system that delivers a fluid to a region between the working surface of the support member and the sealing surface of the enclosure to provide buoyant floatation to the support member at the working surface,
• whereby a sliding seal system is formed that provides a seal between the working surface of the enclosure and the optical system.