Stage apparatus, lithography apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorKEN SASAKI
Life of this patent
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Abstract
A stage apparatus comprising a stage; an actuator including a mover that moves together with the stage, and a stator that generates thrust on the mover, and configured to drive the stage; a gyro moment generation unit connected to the mover; and a control unit configured to control the gyro moment generation unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is canceled by a moment generated by the gyro moment generation unit.
Claims17
A stage apparatus comprising:
- a stage;
- an actuator including a mover that moves together with the stage, and a stator that generates thrust on the mover, and configured to drive the stage;
- a gyro moment generation unit connected to the mover;
- and
- a control unit configured to control the gyro moment generation unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is canceled by a moment generated by the gyro moment generation unit.
A lithography apparatus for transferring a pattern of an original to a substrate, comprising a stage apparatus configured to align the original with the substrate, wherein the stage apparatus comprises:
- a stage;
- an actuator including a mover that moves together with the stage, and a stator that generates thrust on the mover, and configured to drive the stage;
- a gyro moment generation unit connected to the mover;
- and
- a control unit configured to control the gyro moment generation unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is canceled by a moment generated by the gyro moment generation unit.
An article manufacturing method comprising:
- a transfer step of transferring a pattern of an original to a substrate using a lithography apparatus;
- and
- a processing step of processing the substrate that has undergone the transfer step, thereby obtaining an article,
- wherein the lithography apparatus comprises a stage apparatus which is configured to align the original with the substrate and comprises:
- a stage;
- an actuator including a mover that moves together with the stage, and a stator that generates thrust on the mover, and configured to drive the stage;
- a gyro moment generation unit connected to the mover;
- and
- a control unit configured to control the gyro moment generation unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is canceled by a moment generated by the gyro moment generation unit.
Dependencies are inferred from the claim text.