Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium

A diagnostic apparatus for diagnosing a failure location of a control apparatus for an anti-vibration table including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each configured to detect a state quantity of the target object, and a controller configured to control the plurality of actuators based on signals output from the plurality of sensors, the apparatus comprising:

• a recording unit configured to record, during operation of the control apparatus, acceleration data from each of the plurality of sensors in real-time;
• an extracting unit configured to extract characteristic values from the acceleration data using statistical processing over a predetermined time period;
• a comparison unit configured to compare reference characteristic values extracted from acceleration data from each of the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with the extracted characteristic values from the acceleration data recorded during operation of the control apparatus;
• a generating unit configured to generate an abnormality diagnosis pattern based on the comparison, wherein the abnormality diagnosis pattern comprises a vector indicating normal or abnormal status for each sensor;
• a calculating unit configured to calculate similarity measures between the generated abnormality diagnosis pattern and predetermined failure patterns stored in an abnormality diagnosis table;
• and
• a diagnostic unit configured to diagnose, as the failure location, a device including at least one of a failed actuator and a failed sensor among the plurality of actuators and the plurality of sensors based on the calculated similarity measures,
• wherein the diagnosing is performable during continuous operation of the control apparatus without stopping the anti-vibration table.

A control apparatus for controlling an anti-vibration table, comprising:

• a plurality of actuators each configured to apply a thrust to the anti-vibration table;
• a plurality of sensors each configured to detect a state quantity of the anti-vibration table;
• a controller configured to control the plurality of actuators based on signals output from the plurality of sensors;
• a recording unit configured to record, during operation of the control apparatus, the signals output from the plurality of sensors in real-time;
• an extraction unit configured to extract characteristic values from the recorded signals using statistical processing over a predetermined time period;
• a comparison unit configured to compare reference characteristic values extracted from signals output from the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with the extracted characteristic values from the signals recorded during operation of the control apparatus;
• and
• a generating unit configured to generate an abnormality diagnosis pattern based on the comparison, wherein the abnormality diagnosis pattern comprises a vector indicating normal or abnormal status for each sensor;
• a calculating unit configured to calculate similarity measures between the generated abnormality diagnosis pattern and predetermined failure patterns stored in an abnormality diagnosis table;
• and
• a diagnostic unit configured to diagnose, as the failure location, a device including at least one of a failed actuator and a failed sensor among the plurality of actuators and the plurality of sensors based on the calculated similarity measures,
• wherein the diagnosing is performable during continuous operation of the control apparatus without stopping the anti-vibration table.

A lithography apparatus for forming a pattern on a substrate, comprising:

• an anti-vibration table configured to support a base provided with a stage that holds the substrate;
• a plurality of actuators each configured to apply a thrust to the anti-vibration table;
• a plurality of sensors each configured to detect a state quantity of the anti-vibration table;
• a controller configured to control the plurality of actuators based on signals output from the plurality of sensors;
• a recording unit configured to record, during operation of the control apparatus, the signals output from the plurality of sensors in real-time;
• an extraction unit configured to extract characteristic values from the recorded signals using statistical processing over a predetermined time period;
• a comparison unit configured to compare reference characteristic values extracted from signals output from the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with the extracted characteristic values from the signals recorded during operation of the control apparatus;
• and
• a generating unit configured to generate an abnormality diagnosis pattern based on the comparison, wherein the abnormality diagnosis pattern comprises a vector indicating normal or abnormal status for each sensor;
• a calculating unit configured to calculate similarity measures between the generated abnormality diagnosis pattern and predetermined failure patterns stored in an abnormality diagnosis table;
• and
• a diagnostic unit configured to diagnose, as the failure location, a device including at least one of a failed actuator and a failed sensor among the plurality of actuators and the plurality of sensors based on the calculated similarity measures,
• wherein the diagnosing is performable during continuous operation of the control apparatus without stopping the anti-vibration table.

A non-transitory computer-readable storage medium storing a program for causing a computer to execute a method of diagnosing a failure location of a control apparatus for an anti-vibration table including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each configured to detect a state quantity of the target object, and a controller configured to control the plurality of actuators based on signals output from the plurality of sensors, the program causing the computer to execute:

• recording, during operation of the control apparatus, acceleration data from each of the plurality of sensors in real-time;
• extracting characteristic values from the acceleration data using statistical processing over a predetermined time period;
• comparing reference characteristic values extracted from acceleration data from each of the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with the extracted characteristic values from the acceleration data recorded during operation of the control apparatus;
• generating an abnormality diagnosis pattern based on the comparison, wherein the abnormality diagnosis pattern comprises a vector indicating normal or abnormal status for each sensor;
• calculating similarity measures between the generated abnormality diagnosis pattern and predetermined failure patterns stored in an abnormality diagnosis table;
• and
• diagnosing, as the failure location, a device including at least one of a failed actuator and a failed sensor among the plurality of actuators and the plurality of sensors based on the calculated similarity measures,
• wherein the diagnosing is performable during continuous operation of the control apparatus without stopping the anti-vibration table.

A method of diagnosing a failure location of a control apparatus for an anti-vibration table including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each configured to detect a state quantity of the target object, and a controller configured to control the plurality of actuators based on signals output from the plurality of sensors, the method comprising:

• recording, during operation of the control apparatus, data related to the state quantity of the target object from each of the plurality of sensors in real-time;
• extracting characteristic values from the data using statistical processing over a predetermined time period;
• comparing reference characteristic values extracted from data related to the state quantity of the target object from each of the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with the extracted characteristic values from the data recorded during operation of the control apparatus;
• generating an abnormality diagnosis pattern based on the comparison, wherein the abnormality diagnosis pattern comprises a vector indicating normal or abnormal status for each sensor;
• calculating similarity measures between the generated abnormality diagnosis pattern and predetermined failure patterns stored in an abnormality diagnosis table;
• and
• diagnosing, as the failure location, a device including at least one of a failed actuator and a failed sensor among the plurality of actuators and the plurality of sensors based on the calculated similarity measures,
• wherein the diagnosing is performable during continuous operation of the control apparatus without stopping the anti-vibration table.