Buffer unit and substrate treating apparatus including the same
AssigneeSemes Co., Ltd.
InventorsJong Kook Bae, Tae Won Yun, Chang Ho Kim, Hyun Yang Jeong, Sung Hun Eom
Life of this patent
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Abstract
Disclosed are a buffer unit, in which a plurality of support plates is stacked in a vertical direction and a connection block is provided between the plurality of support plates to prevent vibration generated at the lower end of the support plate from being transmitted from the upper support plate, and a substrate treating apparatus. According to the present invention, it is possible to reduce the vibration generated in the buffer unit, so that there is an effect of improving the efficiency of the substrate treating process.
Claims9
A buffer unit for storing or treating a substrate, the buffer unit comprising:
- a plurality of support plates arranged to be stacked in a vertical direction and supporting a substrate on top of each respective one of the plurality of support plates;
- a plurality of connection blocks respectively positioned between the support plates so that respective adjacent support plates, of the plurality of support plates, are vertically spaced apart from each other;
- and
- an anti-vibration pad disposed between a respective one of the plurality of support plates and each respective one of the plurality of connection blocks to prevent vibration from being transmitted from a bottom to the top;
- and
- a first anti-vibration pad and a second anti-vibration pad are between a first respective adjacent support plate, of the plurality of connection blocks, and a first support plate, of the plurality of support plates,
- the first anti-vibration pad and the second anti-vibration pad being provided with different materials.
A buffer unit, comprising:
- support plates including a first support plate, a second support plate and a third support plate, the second support plate disposed above the first support plate, the third support plate disposed above the second support plate, the support plates being configured to support a substrate on top of each respective one of the support plates;
- a first connection block inserted between the first support plate and the second support plate such that the first support plate and the second support plate are vertically spaced apart from each other;
- a second connection block inserted between the second support plate and the third support plate such that the second support plate and the third support plate are vertically spaced apart from each other;
- a first anti-vibration pad disposed between the first support plate and the second support plate to prevent vibration from being transmitted from a bottom to the top;
- and
- a second anti-vibration pad disposed between the second support plate and the third support plate to prevent vibration from being transmitted from the bottom to the top, the first anti-vibration pad being provided with a thicker thickness than a thickness of the second anti-vibration pad.
Dependencies are inferred from the claim text.