Damper, method for damping, and apparatus including a damper
AssigneeASML Netherlands B.V.
InventorsJohannes Hubertus Antonius VAN DE RIJDT, Bas Johannes Petrus ROSET
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Abstract
The present disclosure provides a damper for an object table, the damper comprising: a pair of plates (22,24) arranged defining a volume (30) between them; a plurality of posts (26) arranged in the volume and extending between the pair of plates; and an elastomeric section (32) enclosing the posts and extending between the plates. The posts may be uniformly distributed over the volume. The damper can be configured to serve as an interface between a magnet assembly and a frame of an actuator.
Claims21
-23. (canceled)
A damper for an object table, the damper comprising:
- a pair of plates arranged defining a volume between them;
- a plurality of posts arranged in the volume and extending between the pair of plates;
- and
- an elastomeric section enclosing the posts and extending between the plates.
A method for damping movements of a module, the method comprising:
- providing an apparatus comprising at least one moveable module, the module being provided with at least one actuator;
- connecting at least one damper between the at least one actuator and the module, the damper comprising, at least
- a pair of plates defining a volume between them;
- a plurality of posts arranged in the volume and extending between the pair of plates;
- and
- an elastomeric section enclosing the posts and extending between the plates;
- and
- moving the module using the at least one actuator.
A damper for an object table, the damper comprising:
- a pair of opposing plates arranged to define a volume in between them;
- a plurality of connecting elements arranged in the volume and extending between the pair of plates;
- and
- an elastomeric section enclosing the connecting elements and extending between the pair of plates.
Dependencies are inferred from the claim text.