G03F 7/70833
Mounting of optical systems
Official title: {Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground}
G03F7/70833 (Mounting of optical systems) appears on 358 US grants and 383 published applications in this corpus.
Search patents in G03F- Granted patents
- 358
- Published applications
- 383
- Assignees
- 70
- Inventors
- 722
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 4 | 0 |
| 1997 | 2 | 0 |
| 1998 | 10 | 0 |
| 1999 | 11 | 0 |
| 2000 | 11 | 0 |
| 2001 | 16 | 5 |
| 2002 | 15 | 15 |
| 2003 | 19 | 25 |
| 2004 | 16 | 21 |
| 2005 | 21 | 20 |
| 2006 | 15 | 20 |
| 2007 | 13 | 13 |
| 2008 | 8 | 21 |
| 2009 | 9 | 21 |
| 2010 | 7 | 15 |
| 2011 | 8 | 13 |
| 2012 | 10 | 15 |
| 2013 | 9 | 10 |
| 2014 | 19 | 15 |
| 2015 | 13 | 15 |
| 2016 | 16 | 11 |
| 2017 | 18 | 9 |
| 2018 | 12 | 18 |
| 2019 | 15 | 16 |
| 2020 | 15 | 10 |
| 2021 | 9 | 15 |
| 2022 | 9 | 9 |
| 2023 | 3 | 7 |
| 2024 | 2 | 15 |
| 2025 | 6 | 15 |
| 2026 | 9 | 14 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Digital photolithography system, components thereof and related methods22 Sep 2026US 12,743,029 B2APPLIED Materials.Inc.
- Mask inspection apparatus18 Aug 2026US 12,710,701 B2Stek Co., Ltd.
- Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium19 May 2026US 12,631,972 B2Canon Kabushiki Kaisha
- Interface plate, inspection system and method of installing an inspection system12 May 2026US 12,625,438 B2ASML Netherlands B. V.
- Systems and methods for thermally stable mounting of optical columns5 May 2026US 12,619,168 B2ASML Netherlands B. V.
- Precise, High Throughput Optical Imaging Of Packaged Devices8 Oct 2026US 2026/0310105 A1
- Tunnel optic beam homogenizer for euv illumination systems13 Aug 2026US 2026/0235961 A1KLA Corporation
- Measurement system, measurement method with the aid of such a measurement system, and projection exposure apparatus comprising such a measurement system6 Aug 2026US 2026/0227714 A1
- Measuring system for optically checking an alignment state, method for optically checking an alignment state, alignment method30 Jul 2026US 2026/0219036 A1
- Securing device23 Jul 2026US 2026/0211211 A1
Most cited
By later US patents
- Sliding seal469US 6,600,547 B2Nikon Corporation · 2003
- Window frame-guided stage mechanism438US 5,874,820 ANikon Corporation · 1999
- Lithographic apparatus and device manufacturing method282US 7,075,616 B2ASML Netherlands B. V. · 2006
- Exposure apparatus having dynamically isolated reaction frame110US 6,008,500 ANikon Corporation · 1999
- Lithographic apparatus and device manufacturing method105US 7,110,081 B2ASML Netherlands B. V. · 2006