Interface plate, inspection system and method of installing an inspection system
AssigneeASML Netherlands B.V.
InventorsMarcel Koenraad Marie Baggen, Jasper Hendrik Grasman, Chin-Fa Tu, Lucas Kuindersma
Life of this patent
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Abstract
An interface plate for mounting an apparatus or an assembly of an apparatus to a floor or floor plate is described, the interface plate comprising: an install block having an install surface configured to receive an interface surface of the apparatus or assembly; an adjustment mechanism configured to adjust a position or orientation of the install block relative to the floor or floor plate; and a mounting mechanism configured to rigidly mount the install block to the floor or floor plate.
Claims20
An interface plate for mounting an apparatus or an assembly of an apparatus to a floor or floor plate, the interface plate comprising:
- an install block having an install surface configured to receive an interface surface of the apparatus or assembly;
- an adjustment mechanism located between the install block and the floor or floor plate in a vertical direction, the adjustment mechanism configured to adjust a position or orientation of the install block relative to the floor or floor plate;
- and
- a mounting mechanism configured to rigidly mount the install block to the floor or floor plate.
An inspection system, comprising:
- an inspection apparatus;
- and
- a plurality of interface plates that each comprise:
- an install block having an install surface configured to receive an interface surface of the inspection apparatus or an assembly of the apparatus;
- an adjustment mechanism located between the install block and a floor or floor plate in a vertical direction, the adjustment mechanism configured to adjust a position or orientation of the install block relative to the floor or floor plate;
- and
- a mounting mechanism configured to rigidly mount the install block to the floor or floor plate;
- the plurality of interface plates configured to mount the inspection apparatus or the assembly of the apparatus to the floor or floor plate.
A method of installing an inspection system, the method comprising:
- providing an inspection system comprising an inspection apparatus and a plurality of interface plates that each comprise:
- an install block having an install surface configured to receive an interface surface of the inspection apparatus or an assembly of the apparatus;
- an adjustment mechanism located between the install block and a floor or floor plate in a vertical direction, the adjustment mechanism configured to adjust a position or orientation of the install block relative to the floor or floor plate;
- and
- a mounting mechanism configured to rigidly mount the install block to the floor or floor plate;
- positioning the plurality of interface plates on the floor or floor plate at locations where the mounting mechanism is able to engage with the floor or floor plate;
- adjusting a position or orientation of the install block relative to the floor or floor plate using the adjustment mechanism to enable alignment of the install surfaces of the install blocks to the interface surface of the inspection apparatus or assembly;
- mounting the interface plates to the floor or floor plate using the mounting mechanisms;
- and
- mounting the inspection apparatus or assembly of the inspection apparatus to the interface plates.
Dependencies are inferred from the claim text.