Mask inspection apparatus

A mask inspection apparatus operable for inspecting lower and upper faces of a mask without having to flip the mask, the mask inspection apparatus comprising:

• a booth comprising a framework, a platform on the framework, and a slot in the platform;
• a carrier movable along the slot in the platform, wherein the carrier comprises a support face for supporting the mask, guiding elements on the support face, and an inspection window in the support face, wherein the support face extends above the platform;
• a first linear image scanner vertically movable below the platform;
• a second linear image scanner vertically movable above the platform;
• a light source module comprising two light boxes on the platform and vertically movable between an upper position and a lower position, wherein the light boxes are operable to cast light on an upper face of the mask in the upper position, wherein the light boxes are operable to cast light on a lower face of the mask in the lower position;
• a control unit electrically connected to the carrier, the first and second linear image scanners and the light source module, wherein the control unit comprises a memory unit for storing programs to be executed and data about the inspection;
• and
• a display electrically connected to the control unit to show commands to be executed by the control unit and results of the inspection.