Systems and methods for thermally stable mounting of optical columns
AssigneeASML Netherlands B.V.
InventorsJasper Winters, Erwin John Van Zwet, Marcus Johannes Van Der Lans, Pieter Willem Herman De Jager, Emiel Anton Van De Ven
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Abstract
Systems and methods are disclosed for stabilizing an optical column. One system can include an optical column; a frame configured to support the optical column, the frame having a first coefficient of thermal expansion (CTE); and a subframe configured to be coupled to the optical column in at least two places by a first anchor and a second anchor to stabilize the optical column against a displacement or a rotation caused by thermal expansion in the frame or the optical column, the subframe having a second CTE lower than the first CTE.
Claims19
A system comprising:
- an optical column;
- a frame configured to support the optical column, the frame having a first coefficient of thermal expansion (CTE), wherein the optical column is suspended under a lateral frame section of the frame at a distal end of the optical column;
- and
- a subframe configured to be coupled to the optical column in at least two places by a first anchor and a second anchor to stabilize the optical column against a displacement or a rotation caused by thermal expansion in the frame or the optical column, the subframe having a second CTE lower than the first CTE.
A method for stabilizing an optical column against a displacement or a rotation, the method comprising:
- supporting an optical column with a frame having a first coefficient of thermal expansion (CTE), wherein the optical column is suspended under a lateral frame section of the frame at a distal end of the optical column;
- and
- coupling the optical column to a subframe in at least two places by a first anchor and a second anchor to stabilize the optical column against a displacement or a rotation caused by thermal expansion in the frame or the optical column, the subframe having a second CTE lower than the first CTE.
Dependencies are inferred from the claim text.