G03F 7/70791
Large workpieces
Official title: {Large workpieces, e.g. glass substrates for flat panel displays or solar panels}
G03F7/70791 (Large workpieces) appears on 289 US grants and 320 published applications in this corpus.
Search patents in G03F- Granted patents
- 289
- Published applications
- 320
- Assignees
- 138
- Inventors
- 603
- Latest grant
- 10 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 6 | 0 |
| 1997 | 8 | 0 |
| 1998 | 5 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 6 | 3 |
| 2002 | 5 | 2 |
| 2003 | 11 | 9 |
| 2004 | 5 | 14 |
| 2005 | 10 | 27 |
| 2006 | 16 | 27 |
| 2007 | 16 | 29 |
| 2008 | 12 | 34 |
| 2009 | 16 | 42 |
| 2010 | 17 | 24 |
| 2011 | 17 | 17 |
| 2012 | 23 | 13 |
| 2013 | 16 | 13 |
| 2014 | 20 | 6 |
| 2015 | 9 | 7 |
| 2016 | 17 | 9 |
| 2017 | 7 | 4 |
| 2018 | 6 | 10 |
| 2019 | 4 | 9 |
| 2020 | 7 | 8 |
| 2021 | 8 | 2 |
| 2022 | 1 | 1 |
| 2023 | 0 | 6 |
| 2024 | 2 | 2 |
| 2025 | 1 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Exposure mask and method of manufacturing display device using the same10 Feb 2026US 12,547,078 B2Samsung Display Co., Ltd.
- Machine measurement metrology frame for a lithography system14 Oct 2025US 12,443,116 B2APPLIED Materials.Inc.
- Exposure control in photolithographic direct exposure methods for manufacturing circuit boards or circuits17 Dec 2024US 12,169,370 B2Laser Imaging Systems GmbH & Co. KG
- Method for fast loading substrates in a flat panel tool13 Aug 2024US 12,061,422 B2APPLIED Materials.Inc.
- Exposure apparatus, flat panel display manufacturing method, and device manufacturing method19 Jul 2022US 11,392,048 B2Nikon Corporation
- Stage mechanism, charged particle beam irradiation apparatus, and charged particle beam irradiation method1 Oct 2026US 2026/0299439 A1NuFlare Technology, Inc.
- Substrate supporting member and substrate processing apparatus including the same23 Jan 2025US 2025/0031281 A1Samsung Electronics Co., Ltd.
- Post-overlay compensation on large-field packaging12 Sep 2024US 2024/0302752 A1Onto Innovation Inc.
- Photomask and method of manufacturing display panel using the same8 Feb 2024US 2024/0045339 A1Samsung Display Co., Ltd.
- Exposure mask and method of manufacturing display device using the same7 Dec 2023US 2023/0393482 A1Samsung Display Co., Ltd.
Most cited
By later US patents
- Apparatus for aligning substrates for loading and unloading using a robot mechanism381US 5,537,311 AAPPLIED Materials.Inc. · 1996
- Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus256US 6,795,169 B2Nikon Corporation · 2004
- Scanning light exposure apparatus249US 5,579,147 ANikon Corporation · 1996
- Maskless, reticle-free, lithography172US 5,691,541 AThe Regents of the University of California · 1997
- Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems108US 4,769,680 AMRS Technology, Inc. · 1988