Exposure apparatus, flat panel display manufacturing method, and device manufacturing method

An exposure apparatus that irradiates an object held by a first movable body which moves in a first direction and a second direction orthogonal to each other with an illumination light via an optical system, while the first movable body is moving in the first direction, comprising:

• a first measured section measured based on movement of the first movable body in the first direction, the first measured section being provided on the first movable body;
• a first measuring section measuring the first measured section while relatively moving in the first direction with respect to the first measured section, based on movement of the first movable body in the first direction;
• a plurality of second measured sections arranged at different positions in the first direction, being measured based on movement of the first movable body in the second direction;
• a plurality of second measuring sections arranged at each of the plurality of second measured sections that measures the second measured sections while relatively moving in the second direction with respect to the second measured section, based on movement of the first movable body in the second direction;
• a holding member, at which the plurality of second measured sections are provided, that holds the optical system;
• and
• a second movable member that holds the first measuring section and the plurality of second measuring sections and that moves the first measuring section and the plurality of second measuring sections integrally in the second direction and between the first movable body and the holding member, wherein
• the first measuring section comprises a first measuring section unit and a second measuring section unit arranged at different positions in the first direction, each being configured to irradiate the first measured section with a measurement beam, and
• the measurement beam irradiated by one of the first measuring section unit and the second measuring section unit moves off the first measured section, while the second measuring sections measure the second measured sections and the other of the first measuring section unit and the second measuring section unit irradiates the first measured section with the measurement beam.