Method for fast loading substrates in a flat panel tool

A processing system, comprising:

• a lift pin loader;
• a chuck spaced from the lift pin loader;
• a pair of upper tray exchange modules configured to move along a first set of tracks in a first horizontal direction and a second horizontal direction opposite the first horizontal direction to transfer one or more trays from the lift pin loader to the chuck, and to move a first distance in a third direction perpendicular to the first horizontal direction and a fourth direction opposite the third direction;
• and
• a pair of lower tray exchange modules disposed to the pair of upper tray exchange modules, the pair of lower tray exchange modules being configured to move along a second set of tracks in the first horizontal direction and the second horizontal direction to transfer the one or more trays from the chuck to the lift pin loader, and to move a second distance in the third direction and the fourth direction, the second set of tracks are disposed entirely outward, below, and parallel to the first set of tracks, wherein the first distance maximum is greater than the second distance, wherein the pair of lower tray exchange modules is further configured to move in the first horizontal direction simultaneously with the pair of upper tray exchange modules moving in the second horizontal direction and to move in the third direction simultaneously with the pair of upper tray exchange modules moving in the fourth direction.

A method of processing substrates, comprising:

• transferring a first tray along a first set of tracks in a first direction using a pair of upper tray exchange modules;
• transferring, simultaneously with the transferring of the first tray, a second tray along a second set of tracks disposed entirely outward, below, and parallel the first set of tracks in a second direction opposite the first direction using a pair of lower tray exchange modules;
• moving the first tray in a third direction a first distance to place the first tray on a chuck using the pair of upper tray exchange modules, the third direction being perpendicular to the first direction;
• and
• moving, simultaneously with the moving of the first tray, the second tray in the third direction a second distance to place the second tray on a lift pin loader using the pair of lower tray exchange modules, the first distance greater than the second distance.