G03F 7/70708
Being electrostatic
Official title: {being electrostatic; Electrostatically deformable vacuum chucks}
G03F7/70708 (Being electrostatic) appears on 295 US grants and 325 published applications in this corpus.
Search patents in G03F- Granted patents
- 295
- Published applications
- 325
- Assignees
- 74
- Inventors
- 564
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 6 | 0 |
| 1999 | 1 | 0 |
| 2000 | 4 | 0 |
| 2001 | 9 | 3 |
| 2002 | 9 | 38 |
| 2003 | 17 | 21 |
| 2004 | 21 | 19 |
| 2005 | 23 | 18 |
| 2006 | 13 | 11 |
| 2007 | 10 | 10 |
| 2008 | 7 | 7 |
| 2009 | 7 | 5 |
| 2010 | 10 | 3 |
| 2011 | 3 | 7 |
| 2012 | 3 | 8 |
| 2013 | 7 | 12 |
| 2014 | 8 | 15 |
| 2015 | 5 | 12 |
| 2016 | 17 | 8 |
| 2017 | 10 | 9 |
| 2018 | 7 | 8 |
| 2019 | 14 | 10 |
| 2020 | 7 | 14 |
| 2021 | 13 | 12 |
| 2022 | 11 | 10 |
| 2023 | 7 | 19 |
| 2024 | 11 | 22 |
| 2025 | 16 | 11 |
| 2026 | 12 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Reticle exchange device with reticle levitation22 Sep 2026US 12,745,594 B2Massachusetts Institute of Technology
- Split double sided wafer and reticle clamps25 Aug 2026US 12,717,249 B2ASML Holding N. V.
- Biasable electrostatic chuck18 Aug 2026US 12,712,162 B2APPLIED Materials.Inc.
- Wafer chuck including self-sealing vacuum seal assemblies and methods for operating the same12 May 2026US 12,628,617 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Electrostatic holder, object table and lithographic apparatus5 May 2026US 12,619,165 B2ASML Netherlands B. V.
- Conductive polymers for reticle table cleaning apparatus24 Sep 2026US 2026/0288021 A1ASML Netherlands B. V.
- Electrostatic clamp arrangement10 Sep 2026US 2026/0267238 A1ASML Netherlands B. V.
- Method of manufacturing an electrode for an object holder3 Sep 2026US 2026/0259512 A1ASML Netherlands B. V.
- Reticle frontside potential control with clamp burl connection6 Aug 2026US 2026/0227710 A1ASML Netherlands B. V.
- Object holder and method for manufacturing the object holder6 Aug 2026US 2026/0227715 A1ASML Netherlands B. V.
Most cited
By later US patents
- Methods and systems for determining a critical dimension and a thin film characteristic of a specimen248US 6,633,831 B2KLA-Tencor Technologies Corporation · 2003
- Sensor device for non-intrusive diagnosis of a semiconductor processing system137US 6,244,121 B1APPLIED Materials.Inc. · 2001
- Substrate support with pressure zones having reduced contact area and temperature feedback132US 5,761,023 AAPPLIED Materials.Inc. · 1998
- Methods and systems for determining a critical dimension and overlay of a specimen129US 8,179,530 B2KLA-Tencor Technologies Corporation · 2012
- Stage apparatus, scanning type exposure apparatus, and device produced with the same122US 6,331,885 B1Nikon Corporation · 2001