Electrostatic holder, object table and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsTiannan Guan, Zhuangxiong Huang, Johannes Bernardus Charles Engelen, Güneş Nakiboǧlu, Matthias Kruizinga, Petrus Jacobus Maria Van Gils, Aldo Tralli, Sjoerd Frans De Vries, Marcel Maria Cornelius Franciscus Teunissen, Richard Joseph Bruls, Frits Van Der Meulen
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