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US 2026/0227710 A1Published application
Reticle frontside potential control with clamp burl connection
AssigneeASML Netherlands B.V.
InventorsHari KRISHNAN, Ankur Ramesh BAHETI
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Abstract
An electrostatic reticle clamp includes a dielectric body, electrodes configured to apply a charge to a first side of the body for electrostatically clamping a reticle on a second side of the dielectric body, a plurality of burls on the second side of the dielectric body and configured to contact the reticle, a conductive coating disposed on a surface of a subset of the burls, a power source, and a controller configured to provide voltage from the power source to the conductive coating.
Claims20
An electrostatic reticle clamp, comprising:
- a dielectric body;
- one or more electrodes configured to apply a charge to a first side of the body for electrostatically clamping a reticle on a second side of the dielectric body;
- a plurality of burls on the second side of the dielectric body and configured to contact the reticle;
- a conductive coating disposed on a surface of a subset of the burls;
- and
- a controller configured to provide voltage from a power source to the conductive coating.
3 more elements
A method for forming an electrostatic reticle clamp, the method comprising:
- applying a conductive coating to a first side of a dielectric body having a plurality of burls at the first side;
- and
- patterning the conductive coating on the first side of the body by retaining the coating on a subset of the burls and a conductive path to enable a potential to be applied to the subset of burls through the conductive path.
Dependencies are inferred from the claim text.