Method of manufacturing an electrode for an object holder
AssigneeASML Netherlands B.V.
InventorVolker SCHMIDT
Life of this patent
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Abstract
A method of manufacturing an electrode for an object holder, the method including forming at least two electrode portions on a first insulating layer, the at least two electrode portions being spaced from each other, forming at least one insulating portion on the first insulating layer between the at least two electrode portions such that the at least one insulating portion fills a space between the at least two electrode portions and the at least two electrode portions form a planar surface with the at least one insulating portion, and bonding a second insulating layer to the planar surface.
Claims20
A method of manufacturing an electrode for an object holder, the method comprising:
- forming at least two electrode portions on a first insulating layer, the at least two electrode portions being spaced from each other;
- forming at least one insulating portion on the first insulating layer between the at least two electrode portions such that the at least one insulating portion fills a space between the at least two electrode portions and the at least two electrode portions form a planar surface with the at least one insulating portion;
- and
- bonding a second insulating layer to the planar surface.
An electrode for an object holder, the electrode comprising:
- at least two electrode portions arranged on a first insulating layer, the at least two electrode portions being spaced from each other;
- at least one insulating portion arranged on the first insulating layer between the at least two electrode portions such that the at least one insulating portion fills a space between the at least two electrode portions and the at least two electrode portions form a planar surface with the at least one insulating portion;
- and
- a second insulating layer bonded to the planar surface.
Dependencies are inferred from the claim text.