Back to results
US 12,717,249 B2Granted
Split double sided wafer and reticle clamps
AssigneeASML Holding N.V.
InventorsMatthew Lipson, Eric Justin Monkman, Victor Antonio Perez-Falcon
Life of this patent
Estimating the term…
Abstract
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body.
Claims20
An electrostatic clamp, comprising:
- a first stack and a second stack, wherein the first stack is joined with the second stack by an optical contact bonding and each of the first and second stacks comprises:
- a clamp body;
- one or more electrodes disposed on the clamp body, the one or more electrodes connected or connectable to an electrical power source;
- and
- a dielectric disposed on the one or more electrodes,
- wherein each of the first and second stacks comprises a channel inside the clamp body.
3 more elements
A method for fabricating an electrostatic clamp, the method comprising:
- forming a first stack of the electrostatic clamp;
- forming a second stack of the electrostatic clamp;
- and
- joining the first stack with the second stack by optical contact bonding,
- wherein each of the first and second stacks comprises a channel inside the electrostatic clamp.
2 more elements
An electrostatic clamp, comprising:
- a first stack and a second stack, wherein the first stack is joined with the second stack and each of the first and second stacks comprises:
- a clamp body;
- one or more electrodes, the one or more electrodes connected or connectable to an electrical power source;
- and
- a dielectric,
- wherein the first stack comprises a conductive layer, the conductive layer not connected or not connectable to an electrical power source, and
- wherein the conductive layer and the one or more electrodes of the first stack are on opposite sides of the clamp body of the first stack.
4 more elements
Dependencies are inferred from the claim text.