Object holder and method for manufacturing the object holder

An object holder configured to support an object, the object holder comprising:

• a base body formed from a board with an upper side, a side of the board having a contact surface with a predetermined flatness for contacting the object,
• wherein the side of the board has a notch absorption layer that has a volume density such that the notch absorption layer is able to be compressed by a compaction in layer volume in the case of mechanical action by a foreign particle, without compromising the flatness of the contact surface,
• wherein the side of the board has a multilayer laminate that comprises the notch absorption layer and a top layer arranged on the notch absorption layer, and
• wherein the notch absorption layer and/or top layer comprises boron and/or carbon.

An object holder configured to support an object, the object holder comprising:

• a base body;
• a plurality of burls on the base body, the plurality of burls forming a contact surface with a predetermined flatness for contacting the object,
• wherein each burl of the plurality of burls comprises a multilayer laminate which comprises a notch absorption layer and a top layer arranged on the notch absorption layer,
• wherein the notch absorption layer has a volume density such that the notch absorption layer is able to be compressed by a compaction in layer volume in the case of mechanical action by a foreign particle, without compromising the flatness of the contact surface,
• wherein the notch absorption layer and/or top layer comprises boron and/or carbon.