G03F 7/0002
Lithographic processes using patterning methods other than those involving the exposure to
Official title: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
G03F7/0002 (Lithographic processes using patterning methods other than those involving the exposure to) appears on 3,900 US grants and 5,414 published applications in this corpus.
Search patents in G03F- Granted patents
- 3,900
- Published applications
- 5,414
- Assignees
- 933
- Inventors
- 6,406
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 3 | 0 |
| 1993 | 4 | 0 |
| 1994 | 4 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 4 | 0 |
| 1998 | 9 | 0 |
| 1999 | 12 | 0 |
| 2000 | 16 | 0 |
| 2001 | 15 | 6 |
| 2002 | 20 | 37 |
| 2003 | 23 | 67 |
| 2004 | 40 | 120 |
| 2005 | 62 | 149 |
| 2006 | 60 | 171 |
| 2007 | 74 | 182 |
| 2008 | 86 | 216 |
| 2009 | 75 | 223 |
| 2010 | 161 | 318 |
| 2011 | 138 | 285 |
| 2012 | 186 | 253 |
| 2013 | 194 | 253 |
| 2014 | 231 | 290 |
| 2015 | 216 | 349 |
| 2016 | 247 | 326 |
| 2017 | 267 | 277 |
| 2018 | 216 | 266 |
| 2019 | 264 | 273 |
| 2020 | 231 | 252 |
| 2021 | 210 | 249 |
| 2022 | 194 | 230 |
| 2023 | 189 | 194 |
| 2024 | 176 | 177 |
| 2025 | 171 | 158 |
| 2026 | 94 | 93 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Pattern forming method, semiconductor device manufacturing method, and template6 Oct 2026US 12,754,487 B2Kioxia Corporation
- Control of metallic contamination from metal-containing photoresist29 Sep 2026US 12,748,352 B2Lam Research Corporation
- Hybrid method of forming microstructure array molds, methods of making microstructure arrays, and methods of use15 Sep 2026US 12,734,730 B2Panther Life Sciences Corporation
- Surface treatment for replication15 Sep 2026US 12,736,871 B2NILT Switzerland GmbH
- Imprinting apparatus15 Sep 2026US 12,736,872 B2Koninklijke Philips N. V.
- Imprint apparatus, imprint method and article manufacturing method8 Oct 2026US 2026/0307325 A1Canon Kabushiki Kaisha
- Method for manufacturing optical element, and optical element8 Oct 2026US 2026/0307345 A1Canon Kabushiki Kaisha
- Method for Multicolor Lithography Using Mechanical Force8 Oct 2026US 2026/0308288 A1California Institute of Technology
- System and Process for Imprinting8 Oct 2026US 2026/0310071 A1Morphotonics Holding B.V.
- Run to run overlay compensation in lithography sequences employing different lithography methods8 Oct 2026US 2026/0310103 A1
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Nanoimprint lithography828US 5,772,905 ARegents of the University of Minnesota · 1998
- Method and device for moving molecules by the application of a plurality of electrical fields698US 5,126,022 ASoane Tecnologies, Inc. · 1992
- Method for manufacturing porous structure and method for forming pattern645US 6,565,763 B1Kabushiki Kaisha Toshiba · 2003
- Etching of nano-imprint templates using an etch reactor522US 7,955,516 B2APPLIED Materials.Inc. · 2011