Hybrid method of forming microstructure array molds, methods of making microstructure arrays, and methods of use

Abstract

A method of forming a master mold (52), comprising: a) forming a plurality of microstructure portions (42) in a substrate formed of a first material by a first micromachining process, each microstructure portion comprising a shaft (40) and a distal tip (38); b) preparing a negative mold (46) of the plurality of microstructure portions, wherein the mold is formed of a second material and comprises a plurality of cavities (48) corresponding to each microstructure portion in the plurality of microstructure portions (42); c) electroplating a metal (50) onto the negative mold to fill each cavity in the plurality of cavities and to form a base layer (54) extending from the negative mold; d) forming a proximal section (56) for each of the microstructures in the base layer using a second micromachining process (e.g. mechanical micromachining); and e) before or after said step d), removing the negative mold from the metal to form a master mold.

Dependencies are inferred from the claim text.