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US 2026/0310071 A1Published application
System and Process for Imprinting
AssigneeMorphotonics Holding B.V.
InventorsRob Antonius Waltherus Neelen, Jan Matthijs Ter Meulen
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Abstract
The invention relates to a system and process for imprinting, in particular nanoimprinting. The system includes thereto a combination of a roller configured for rolling at least one flexible stamp over at least one substrate which is to be imprinted, a stage configured for providing support to at least one carrier and/or at least one substrate during imprinting and a carrier configured for carrying at least one substrate which is to be imprinted.
Claims26
A system for imprinting, in particular nanoimprinting, comprising:
- at least one roller configured for exerting pressure onto at least one flexible stamp and/or at least one substrate which is to be imprinted;
- at least one carrier configured for carrying at least one substrate which is to be imprinted;
- and
- at least one stage configured for providing support to at least one carrier and/or at least one substrate during imprinting;
- wherein at least one roller and at least one stage are mutually displaceable in an imprint direction in particular such that imprinting is facilitated;
- and
- wherein at least one carrier and at least one stage are mutually displaceable between at least:
- an adjusting configuration, wherein said carrier and said stage are mutually displaceable in at least one direction which differs from the imprint direction such that at least one substrate provided upon said carrier can be aligned with respect to said stage;
- and
- an imprinting configuration, wherein at least one carrier engages at least one stage such that at least one substrate provided upon said carrier can be imprinted;
- wherein the at least one carrier comprises at least one endless belt, wherein at least part of the endless belt encloses at least part of the at least one stage, at least in the imprinting configuration.
8 more elements
Dependencies are inferred from the claim text.