Imprint apparatus, imprint method and article manufacturing method

An imprint method of forming a pattern of an imprint material in each of a plurality of shot regions of a substrate using a mold, the method comprising:

• holding the substrate on a holding surface of a substrate holding unit;
• and
• deforming a pattern surface of the mold by adjusting a pressure of a closed space defined between a surface of the mold opposite to the pattern surface and a mold holding unit in a state in which the mold is held by the mold holding unit,
• wherein in the deforming, a shape of the pattern surface is controlled by adjusting the pressure of the closed space during a contacting step and a filling step of an imprint process in accordance with a position of the shot region to make the shape of the pattern surface conform to a surface shape of the shot region when forming the pattern in each of the plurality of shot regions,
• wherein, during the contacting step, a positive pressure, greater than an atmospheric pressure around the closed space, is applied to the closed space to deform the shape of the pattern surface into a convex shape, and
• wherein, during the filling step, for a shot region including a non-facing region that is positioned at a periphery of the substrate and does not face the holding surface in a state in which the substrate is held by the substrate holding unit, a negative pressure, less than the atmospheric pressure around the closed space, is applied to the closed space to deform the shape of the pattern surface into a concave shape to make the shape of the pattern surface conform to a curve generated in the non-facing region.