G03F 1/62
Pellicles
Official title: Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
G03F1/62 (Pellicles) appears on 929 US grants and 1,045 published applications in this corpus.
Search patents in G03F- Granted patents
- 929
- Published applications
- 1,045
- Assignees
- 230
- Inventors
- 1,637
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 3 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 3 | 0 |
| 1985 | 6 | 0 |
| 1986 | 2 | 0 |
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 7 | 0 |
| 1990 | 4 | 0 |
| 1991 | 10 | 0 |
| 1992 | 5 | 0 |
| 1993 | 7 | 0 |
| 1994 | 10 | 0 |
| 1995 | 6 | 0 |
| 1996 | 6 | 0 |
| 1997 | 10 | 0 |
| 1998 | 12 | 0 |
| 1999 | 7 | 0 |
| 2000 | 7 | 0 |
| 2001 | 17 | 12 |
| 2002 | 19 | 20 |
| 2003 | 27 | 25 |
| 2004 | 35 | 36 |
| 2005 | 17 | 33 |
| 2006 | 22 | 29 |
| 2007 | 17 | 21 |
| 2008 | 19 | 28 |
| 2009 | 15 | 31 |
| 2010 | 21 | 33 |
| 2011 | 20 | 47 |
| 2012 | 22 | 25 |
| 2013 | 33 | 25 |
| 2014 | 34 | 25 |
| 2015 | 33 | 29 |
| 2016 | 30 | 40 |
| 2017 | 36 | 35 |
| 2018 | 38 | 67 |
| 2019 | 40 | 41 |
| 2020 | 55 | 64 |
| 2021 | 57 | 50 |
| 2022 | 43 | 75 |
| 2023 | 38 | 73 |
| 2024 | 54 | 71 |
| 2025 | 53 | 72 |
| 2026 | 22 | 38 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Pellicle holding module, pellicle thermal durability evaluation device comprising same, and pellicle thermal durability evaluation method25 Aug 2026US 12,717,226 B2Iucf-Hyu (Industry-University Cooperation Foundation Hanyang University)
- Methods of manufacturing a pellicle having graphite layer4 Aug 2026US 12,699,315 B2Research & Business Foundation Sungkyunkwan University
- Pellicle membrane for a lithographic apparatus28 Jul 2026US 12,693,592 B2ASML Netherlands B. V.
- Pellicle, exposure master, exposure device, pellicle production method and test method for mask adhesive layer14 Jul 2026US 12,681,381 B2Mitsui Chemicals, Inc.
- Agglutinant for pellicles, pellicle frame with agglutinant layer, pellicle, exposure original plate with pellicle, exposure method, method for producing semiconductor, and method for producing liquid crystal display board7 Jul 2026US 12,675,041 B2Shin-Etsu Chemical Co., Ltd.
- Pellicle frame, pellicle, and exposure plate with pellicle, and method for producing pellicle frame, exposure method, method for producing semiconductor device, and method for producing liquid-crystal display panel24 Sep 2026US 2026/0287996 A1Nippon Light Metal Company, Ltd.
- Pellicle and method of manufacturing thereof24 Sep 2026US 2026/0287997 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Pellicle film and pellicle10 Sep 2026US 2026/0267217 A1Lintec Corporation
- Nanofiber pellicle film production and apparatus10 Sep 2026US 2026/0267218 A1Lintec of America, Inc.
- Multi-layer pellicle membrane10 Sep 2026US 2026/0267219 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method of making an extreme ultraviolet pellicle378US 9,256,123 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2016
- Reticle and optical proximity correction method133US 7,527,900 B2United Microelectronics Corp. · 2009
- Method for making a mask by forming a phase bar in an integrated circuit design layout78US 8,850,366 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2014
- Apparatus with four light detectors for checking surface of mask with pellicle76US 4,889,998 ANikon Corporation · 1989
- Inspecting apparatus for determining presence and location of foreign particles on reticles or pellicles75US 4,966,457 ANikon Corporation · 1990