Pellicle holding module, pellicle thermal durability evaluation device comprising same, and pellicle thermal durability evaluation method
AssigneeIucf-Hyu (Industry-University Cooperation Foundation Hanyang University)
InventorsJin Ho Ahn, Seong Ju Wi, Yong Ju Jang
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Abstract
Provided is a pellicle thermal durability evaluation device. The pellicle thermal durability evaluation device may comprise: a chamber; a pellicle holder which is disposed in the chamber and on which a pellicle is seated; a durability measurement unit including a temperature measurement module for measuring the temperature of the pellicle seated on the pellicle holder; and a light source unit which irradiates the pellicle by controlling the intensity of light according to the type of the pellicle seated on the pellicle holder.
Claims9
A pellicle thermal durability evaluation device comprising:
- a durability measurement unit comprising a chamber, a pellicle holder disposed in the chamber and on which the pellicle is seated, and a temperature measurement module configured to measure a temperature of the pellicle seated on the pellicle holder;
- and
- a light source unit configured to control intensity of light according to a type of the pellicle seated on the pellicle holder to irradiate the pellicle with the light;
- wherein the durability measurement unit is configured to calculate, after the irradiating the light to the pellicle and before the measuring the temperature of the pellicle, a thermal load absorbed by the pellicle, and
- wherein the temperature of the pellicle is measured according to the thermal load absorbed by the pellicle.
A pellicle thermal durability evaluation method comprising:
- seating a pellicle on a pellicle holder disposed in a chamber;
- calculating intensity of light irradiated to the pellicle according to a type of the pellicle;
- controlling the intensity of the light with the calculated intensity of the light to irradiate the controlled light to the pellicle;
- calculating a thermal load absorbed by the pellicle;
- and
- measuring a temperature of the pellicle,
- wherein the temperature of the pellicle is measured according to the thermal load absorbed by the pellicle.
Dependencies are inferred from the claim text.